US Patent 8858754 Plasma processing apparatus

Patent 8858754 was granted and assigned to Tokyo Electron on October, 2014 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8858754

Patent Inventor Names

Masato Horiguchi0

Takashi Kitazawa0

Hiroshi Tsujimoto0

Date of Patent

October 14, 2014

Patent Application Number

13114101

Date Filed

May 24, 2011

Patent Citations Received

‌

US Patent 11923220 Substrate processing apparatus

Patent Primary Examiner

‌

Rudy Zervigon

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