US Patent 8860022 Oxide semiconductor film and semiconductor device

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Patent Number

Patent Inventor Names

Yasuharu Hosaka0

Yusuke Nonaka0

Shuhei Yokoyama0

Takashi Hamochi0

Toshinari Sasaki0

Date of Patent

October 14, 2014

Patent Application Number

138627160

Date Filed

April 15, 2013

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