US Patent 8867020 Metrology method and apparatus, and device manufacturing method

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Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8867020

Patent Inventor Names

Patrick Warnaar0

Hendrik Jan Hidde Smilde0

Date of Patent

October 21, 2014

Patent Application Number

13235902

Date Filed

September 19, 2011

Patent Citations Received

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US Patent 11784098 Method and apparatus to determine a patterning process parameter

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US Patent 11703772 Recipe selection based on inter-recipe consistency

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US Patent 11710668 Method and apparatus to determine a patterning process parameter

Patent Primary Examiner

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Hung Henry Nguyen

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