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US Patent 8871064 Electromagnet array in a sputter reactor

Patent 8871064 was granted and assigned to Applied Materials on October, 2014 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

88710640

Patent Inventor Names

Tza-Jing Gung0

Xinyu Fu0

Andrew S. Gillard0

Arvind Sundarrajan0

Edward P. Hammond, IV0

John C. Forster0

Mark A. Perrin0

Praburam Gopalraja0

Date of Patent

October 28, 2014

Patent Application Number

126956430

Date Filed

January 28, 2010

Patent Citations Received

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US Patent 11948784 Tilted PVD source with rotating pedestal

Patent Primary Examiner

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John Brayton

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