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US Patent 8884523 Driving at least two high frequency-power generators

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Is a

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Inventor Names

Markus Winterhalter0

Ekkehard Mann0

Date of Patent

November 11, 2014

Patent Application Number

11934901

Date Filed

November 5, 2007

Patent Citations Received

US Patent 12125673 Pulsed voltage source for plasma processing applications

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US Patent 11972924 Pulsed voltage source for plasma processing applications

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US Patent 11984306 Plasma chamber and chamber component cleaning methods

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US Patent 12106938 Distortion current mitigation in a radio frequency plasma processing chamber

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US Patent 12111341 In-situ electric field detection method and apparatus

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US Patent 11694876 Apparatus and method for delivering a plurality of waveform signals during plasma processing

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US Patent 11699572 Feedback loop for controlling a pulsed voltage waveform

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