US Patent 8887116 Flexible pattern-oriented 3D profile for advanced process nodes

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Patent Number

Patent Inventor Names

Ke-Ying Su0

Te-Yu Liu0

Austin Chingyu Chiang0

Chia-Ming Ho0

Meng-Fan Wu0

Date of Patent

November 11, 2014

Patent Application Number

13906614

Date Filed

May 31, 2013

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