US Patent 8894806 Plasma processing apparatus and plasma processing method
Patent 8894806 was granted and assigned to Tokyo Electron on November, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 26, 2010
0
Date of Patent
November 25, 2014
0
Patent Application Number
12732711
0
Patent Citations Received
Patent Inventor Names
Chishio Koshimizu
0
Yohei Yamazawa
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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