US Patent 8895230 Spin-on carbon compositions for lithographic processing

Patent 8895230 was granted and assigned to Brewer Science on November, 2014 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

Brewer Science

Current Assignee

Brewer Science

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

88952300

Patent Inventor Names

Sean Simmons0

Yubao Wang0

Daniel M. Sullivan0

Qin Lin0

Vandana Krishnamurthy0

Date of Patent

November 25, 2014

Patent Application Number

136488900

Date Filed

October 10, 2012

Patent Citations Received

‌

US Patent 11972948 Adhesion layers for EUV lithography

Patent Primary Examiner

‌

Caleen Sullivan

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