US Patent 8896809 Lithographic apparatus and device manufacturing method

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Patent Jurisdiction

Patent Number

Patent Inventor Names

Judocus Marie Dominicus Stoeldraijer0

Diederik Jan Maas0

Erik Roelof Loopstra0

Jan Bernard Plechelmus Van Schoot0

Date of Patent

November 25, 2014

Patent Application Number

118897220

Date Filed

August 15, 2007

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