US Patent 8902561 Electrostatic chuck with multi-zone control
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US Patent 08902561 Electrostatic chuck with multi-zone control US Patent 8902561 Electrostatic chuck with multi-zone control
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Patent Number
0890256100
Patent Number
890256100
Edits on 28 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
089025610
Date of Patent
December 2, 2014
0Patent Application Number
133644630
Date Filed
February 2, 2012
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
089025610
Date of Patent
December 2, 2014
0Patent Application Number
133644630
Date Filed
February 2, 2012
0Official Website
Patent Primary Examiner
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Golden AI
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Golden AI
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US Patent 08902561 Electrostatic chuck with multi-zone control
Infobox
Is a
Patent jurisdiction
Patent number
08902561
Date of patent
December 2, 2014
Patent application number
13364463
Date Filed
February 2, 2012
Patent primary examiner
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