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US Patent 8912835 Method and system for controlling radio frequency power

Patent 8912835 was granted and assigned to MKS Instruments on December, 2014 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

MKS Instruments

Current Assignee

MKS Instruments

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8912835

Date of Patent

December 16, 2014

Patent Application Number

14151321

Date Filed

January 9, 2014

Patent Citations Received

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US Patent 11972926 Dynamic control-setpoint modification

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US Patent 12080530 Model reference adaptive control with signum projection tensor operations

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US Patent 11948775 Combined RF generator and RF solid-state matching network

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US Patent 11990324 Adaptive predictive control system

Patent Primary Examiner

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William Hernandez

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