Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sung-Eun Park0
Hyung-Hwan Kim0
Min-Cheol Kang0
Seong-Su Lim0
Seung-Seok Pyo0
Date of Patent
January 27, 2015
0Patent Application Number
142512100
Date Filed
April 11, 2014
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor device includes a plurality of first conductive patterns separated by a damascene pattern, a second conductive pattern buried in the damascene pattern, and a spacer including an air gap between the second conductive pattern and the first conductive patterns.
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