US Patent 8963402 Piezoelectric vibrator element, piezoelectric module, and electronic device

Patent 8963402 was granted and assigned to Seiko Epson on February, 2015 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Seiko Epson

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8963402

Date of Patent

February 24, 2015

Patent Application Number

13295547

Date Filed

November 14, 2011

Patent Citations Received

‌

US Patent 12133362 Cooling element architecture for MEMS-based cooling system architecture

Patent Primary Examiner

‌

Thomas Dougherty

Patent abstract

A piezoelectric vibrator element includes a vibrating portion that excites thickness-shear vibration, and a peripheral portion that is disposed on the periphery of the vibrating portion and has a thickness thinner than the vibrating portion, the vibrating portion and the peripheral portion being formed in a piezoelectric substrate. A buffering portion and a mount portion are sequentially connected to the peripheral portion. The buffering portion includes a slit formed between the mount portion and the peripheral portion. The mount portion has notches which are formed at both end portions in a direction orthogonal to an arrangement direction of the mount portion, the buffering portion, and the peripheral portion.

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