US Patent 8980045 Substrate cleaning chamber and components
Patent 8980045 was granted and assigned to Applied Materials on March, 2015 by the United States Patent and Trademark Office.
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Patent abstract
A consumable ceramic liner can be used for connecting a gas outlet channel of a remote chamber to a gas inlet channel of a substrate cleaning chamber. The ceramic liner comprises an inlet cylinder having an outer diameter sized to fit in the gas outlet channel of the remote chamber, and an outlet cylinder connected to the gas inlet channel of the substrate cleaning chamber. A conical flare joins the inlet cylinder to the outlet cylinder.
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US Patent 08980045 Substrate cleaning chamber and components US Patent 8980045 Substrate cleaning chamber and components
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Patent Number
0898004500
Patent Number
898004500
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
089800450
Date of Patent
March 17, 2015
0Patent Application Number
131099170
Date Filed
May 17, 2011
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
089800450
Date of Patent
March 17, 2015
0Patent Application Number
131099170
Date Filed
May 17, 2011
0Official Website
Patent Primary Examiner
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US Patent 08980045 Substrate cleaning chamber and components
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08980045
Date of patent
March 17, 2015
Patent application number
13109917
Date Filed
May 17, 2011
Patent primary examiner
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