Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 17, 2015
Patent Application Number
13642499
Date Filed
April 5, 2011
Patent Citations Received
Patent Primary Examiner
Patent abstract
A microphone is disclosed in which a housing is formed by a cap (13) sealed to a substrate (11). A MEMS die (10) is mounted on the substrate (11), the MEMS die (10) incorporating a membrane (12). The membrane (12) has a first surface facing the substrate and in fluid communication with an acoustic inlet port (14) in the cap (13) via an acoustic path (17) and a second surface facing the inner surface of the cap, which second surface along with part of the inner surface of the cap (13) defines at least part of a sealed chamber (19) within which a volume of air is trapped.
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