Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hong Shih0
Li Xu0
Nianci Han0
Date of Patent
April 21, 2015
Patent Application Number
13368255
Date Filed
February 7, 2012
Patent Citations Received
0
0
Patent Primary Examiner
Patent abstract
A substrate processing chamber component comprising a chamber component structure having an yttrium-aluminum coating. The yttrium-aluminum coating comprises a compositional gradient through a thickness of the coating.
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