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US Patent 9028924 In-situ deposition of film stacks
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Patent
Date Filed
November 7, 2012
Date of Patent
May 12, 2015
Patent Application Number
13671424
Patent Citations Received
US Patent 12080592 Film stack simplification for high aspect ratio patterning and vertical scaling
0
US Patent 11746420 PECVD apparatus for in-situ deposition of film stacks
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
9028924
Patent Primary Examiner
Bret Chen
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