Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven T. Mayer0
Zhian He0
Bryan Buckalew0
John Sukamto0
Jonathan Reid0
Seshasayee Varadarajan0
Date of Patent
June 2, 2015
0Patent Application Number
133593430
Date Filed
January 26, 2012
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In a copper electroplating apparatus having separate anolyte and catholyte portions, the concentration of anolyte components (e.g., acid or copper salt) is controlled by providing a diluent to the recirculating anolyte. The dosing of the diluent can be controlled by the user and can follow a pre-determined schedule. For example, the schedule may specify the diluent dosing parameters, so as to prevent precipitation of copper salt in the anolyte. Thus, precipitation-induced anode passivation can be minimized.
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