Techniques for performing built-in self-test (BIST) of performance of an RF system are disclosed. The techniques may be used, for example, for measuring distortion generated by the RF system under test, detecting faults in the system, determining calibration of the system, and/or assisting in compensating analog circuitry that is sensitive to temperature, supply voltage, and/or process variations. Also, a BIST architecture for determining RF performance of an RF systems is disclosed.