Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 9, 2015
Patent Application Number
12210060
Date Filed
September 12, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
Porous ULK film is cured with UV radiation at progressively shorter wavelengths to obtain ULK films quickly at a desired dielectric constant with improved mechanical properties. At longer wavelengths above about 220 nm or about 240 nm, porogen is removed while minimizing silicon-carbon bond formation. At shorter wavelengths, mechanical properties are improved while dielectric constant increases.
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