Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tomohiro Kurebayashi0
Ichiro Mitsuyoshi0
Jun Shibukawa0
Shinji Kiyokawa0
Date of Patent
June 9, 2015
0Patent Application Number
138399560
Date Filed
March 15, 2013
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate processing apparatus is composed of an indexer block, a first processing block and a second processing block that are provided in parallel with one another. The indexer block is provided with an indexer robot. The first processing block is provided with a plurality of back surface cleaning units and a first main robot. The second processing block is provided with a plurality of end surface cleaning units, a plurality of top surface cleaning units and a second main robot.
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