Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chih-Chao Yang0
Haining S. Yang0
Date of Patent
June 16, 2015
Patent Application Number
13919401
Date Filed
June 17, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor fuse and methods of making the same. The fuse includes a fuse element and a compressive stress liner that reduces the electro-migration resistance of the fuse element. The method includes forming a substrate, forming a trench feature in the substrate, depositing fuse material in the trench feature, depositing compressive stress liner material over the fuse material, and patterning the compressive stress liner material.
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