Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Thomas Adrian Ooms0
Godefridus Cornelius Antonius Couweleers0
Guido de Boer0
Niels Vergeer0
Date of Patent
June 30, 2015
0Patent Application Number
134367380
Date Filed
March 30, 2012
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The invention relates to a differential interferometer module adapted for measuring a direction of displacement between a reference mirror and a measurement mirror. In an embodiment the differential interferometer module is adapted for emitting three reference beams towards a first mirror and three measurement beams towards a second mirror for determining a displacement between said first and second mirror. In a preferred embodiment the same module is adapted for measuring a relative rotation around two perpendicular axes as well. The present invention further relates to a lithography system comprising such a interferometer module and a method for measuring such a displacement and rotations.
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