Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wataru Nakamura0
Yoshimasa Chikama0
Hiromitsu Katsui0
Kenichi Kitoh0
Tetsunori Tanaka0
Date of Patent
June 30, 2015
Patent Application Number
13983655
Date Filed
January 31, 2012
Patent Citations Received
Patent Primary Examiner
Patent abstract
A drain electrode (17) includes (i) a lower drain electrode (17a) stacked on a semiconductor layer (14) so as to partially cover an upper surface of the semiconductor layer (14) and (ii) an upper drain electrode (17b). The semiconductor layer (14), the lower drain electrode (17a), and the upper drain electrode (17b) form steps. In a step part where the steps are formed, a distance between a periphery of the lower drain electrode (17a) and a periphery of the upper drain electrode (17b) is more than 0.4 μm but less than 1.5 μm.
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