Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 30, 2015
Patent Application Number
13816493
Date Filed
August 11, 2011
Patent Citations Received
Patent Primary Examiner
Patent abstract
The invention relates to a temperature compensated micromechanical resonator and method of manufacturing thereof. The resonator comprises a resonator element comprising a semiconductor crystal structure, which is doped so as to reduce its temperature coefficient of frequency, transducer means for exciting to the resonator element a vibrational mode. According to the invention the crystal orientation and shape of the resonator element are chosen to allow for a shear mode having a saddle point to be excited to the resonator element, and said transducer means are adapted to excite said shear mode to the resonator element. Accurate micromechanical resonators with now temperature drift can be achieved by means of the invention.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
