Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 14, 2015
Patent Application Number
13664873
Date Filed
October 31, 2012
Patent Citations Received
Patent Primary Examiner
Patent abstract
An improved bulk FinFET with a punchthrough stopper region, and method of fabrication are disclosed. The dopants used to form the punchthrough stopper are supplied from a shallow trench isolation liner. An anneal diffuses the dopants from the shallow trench isolation liner into the bulk substrate and lower portion of the fins, to form the punchthrough stopper region.
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