Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 21, 2015
Patent Application Number
14073993
Date Filed
November 7, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
A transistor includes a multilayer film in which an oxide semiconductor film and an oxide film are stacked, a gate electrode, and a gate insulating film. The multilayer film overlaps with the gate electrode with the gate insulating film interposed therebetween. The multilayer film has a shape having a first angle between a bottom surface of the oxide semiconductor film and a side surface of the oxide semiconductor film and a second angle between a bottom surface of the oxide film and a side surface of the oxide film. The first angle is acute and smaller than the second angle. Further, a semiconductor device including such a transistor is manufactured.
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