US Patent 9099503 Plasma processing apparatus
Patent 9099503 was granted and assigned to Tokyo Electron on August, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 17, 2008
0
Date of Patent
August 4, 2015
0
Patent Application Number
12253480
0
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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