US Patent 9110461 Semiconductor manufacturing equipment
Patent 9110461 was granted and assigned to Hitachi on August, 2015 by the United States Patent and Trademark Office.
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Semiconductor manufacturing equipment includes: a controller controlling driving and processes of various parts of the semiconductor manufacturing equipment, and a sensor monitoring each physical amount in the semiconductor manufacturing equipment or a status of each chemical response amount; a database; and an arithmetic section executing: processing of reading out equipment data, calculating a correlation matrix between time points based on a plurality of pieces of signal data to be compared, calculating eigen values and eigen vectors from the correlation matrix, and calculating principal component scores by principal component analysis; processing of comparing magnitudes of the eigen values of the principal components, arranging the eigen values in descending order to display a list thereof; and processing of displaying a scatter diagram where the principal component scores of the respective signals are plotted in a feature space selecting the principal component corresponding to the eigen value having a contribution ratio.
US Patent 09110461 Semiconductor manufacturing equipment US Patent 9110461 Semiconductor manufacturing equipment
US Patent 09110461 Semiconductor manufacturing equipment
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