US Patent 9129778 Fluid distribution members and/or assemblies
Patent 9129778 was granted and assigned to Lam Research on September, 2015 by the United States Patent and Trademark Office.
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Patent abstract
A fluid distribution member assembly for use in a substrate processing system includes a fluid distribution member having a central portion and a perimeter portion. The fluid distribution member defines at least one slot formed there-through and the at least one slot extends along a non-radial path configured to allow the central portion to expand and rotate with respect to the perimeter portion.
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US Patent 09129778 Fluid distribution members and/or assemblies US Patent 9129778 Fluid distribution members and/or assemblies
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Patent Number
091297780
Patent Number
91297780
Edits on 29 Apr, 2023
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
091297780
Date of Patent
September 8, 2015
0Patent Application Number
130517130
Date Filed
March 18, 2011
0Official Website
Patent Primary Examiner
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US Patent 09129778 Fluid distribution members and/or assemblies
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
09129778
Date of patent
September 8, 2015
Patent application number
13051713
Date Filed
March 18, 2011
Patent primary examiner
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