Is a
Patent attributes
Patent Applicant
Current Assignee
0
Patent Jurisdiction
Patent Number
Date of Patent
September 29, 2015
0Patent Application Number
144758440
Date Filed
September 3, 2014
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A capacitor dielectric can be between the storage node and the electrode layer. A supporting pattern can be connected to the storage node, where the supporting pattern can include at least one first pattern and at least one second pattern layered on one another, where the first pattern can include a material having an etch selectivity with respect to the second pattern.
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