US Patent 9188554 Pattern inspection device and pattern inspection method
Patent 9188554 was granted and assigned to Hitachi on November, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 22, 2013
0
Date of Patent
November 17, 2015
0
Patent Applicant
Patent Application Number
14403668
0
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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