US Patent 9206512 Gas distribution system
Patent 9206512 was granted and assigned to Applied Materials on December, 2015 by the United States Patent and Trademark Office.
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In some embodiments, a gas distribution system may include a body disposed within a through hole formed in a process chamber body, the body comprising an opening, wherein an outer surface of the body is disposed a first distance from an inner surface of the through hole to form a first gap; a flange disposed proximate a first end of the body, the flange having an outer dimension greater than an inner dimension of the through hole; a showerhead disposed proximate a second end of the body opposite the first end and extending outwardly from the body to overlap a portion of the process chamber body, the showerhead configured to allow a flow of gas to an inner volume of the process chamber, wherein an outer surface of the showerhead is disposed a second distance from an inner surface of the process chamber body to form a second gap.
US Patent 09206512 Gas distribution system US Patent 9206512 Gas distribution system
US Patent 09206512 Gas distribution system
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