US Patent 9208992 Method for controlling ion energy distribution
Patent 9208992 was granted and assigned to ADVANCED ENERGY INDUSTRIES, INC. on December, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 27, 2015
Date of Patent
December 8, 2015
Patent Applicant
Patent Application Number
14606857
Patent Citations Received
•••
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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