US Patent 9209521 On-chip helix antenna

A rectangular helix antenna in an integrated circuit includes upper electrodes disposed in a first metal layer, lower electrodes disposed in a second metal layer, and side electrodes connecting the upper electrodes with the lower electrodes, respectively. The upper electrodes are disposed at an angle with respect to the lower electrodes. The upper electrodes, the lower electrodes, and the side electrodes form one continuous electrode spiraling around an inner shape of a rectangular bar. A micro-electromechanical system (MEMS) helix antenna has a similar structure to the rectangular helix antenna, but can have an inner shape of a bar.