Is a
Patent attributes
Patent Applicant
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven C. Shackleton0
Byung-Jin Choi0
Kosta S. Selinidis0
Yeong-Jun Choi0
Date of Patent
January 5, 2016
0Patent Application Number
140267750
Date Filed
September 13, 2013
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Nano imprint lithography templates for purging of fluid during nano imprint lithography processes are described. The templates may include an inner channel and an outer channel. The inner channel constructed to provide fluid communication with a process gas supply to a region between the template and a substrate during the nano imprint lithography process. The outer channel constructed to evacuate fluid and/or confine fluid between the active area of template and the substrate.
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