US Patent 9230824 Method of manufacturing semiconductor device
Patent 9230824 was granted and assigned to Tokyo Electron on January, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 18, 2014
0
Date of Patent
January 5, 2016
0
Patent Applicant
Patent Application Number
14574565
0
Patent Citations Received
Patent Inventor Names
Susumu Nogami
0
Wataru Takayama
0
Daisuke Tamura
0
Jun Kawanobe
0
Kyosuke Hayashi
0
Shoichiro Matsuyama
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 9230824 Method of manufacturing semiconductor device
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
