Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 12, 2016
Patent Application Number
13886631
Date Filed
May 3, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
Measurements of line roughness are separated into groups depending upon pre-layers. Image data collected from similar pre-layer types are considered together in order to separate effects of line roughness from distortion of measurements caused by the pre-layers. The resulting line roughness measurements are used to estimate an aspect of line quality.
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