US Patent 9245744 Combinatorial plasma enhanced deposition and etch techniques
Patent 9245744 was granted and assigned to Intermolecular (company) on January, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 15, 2014
0
Date of Patent
January 26, 2016
0
Patent Applicant
Patent Application Number
14253712
0
Patent Citations Received
Patent Inventor Names
Tony P. Chiang
0
Chi-I Lang
0
Sunil Shanker
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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