Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Geun Young Yeom0
Jong Sik Oh0
Kyung Seok Min0
Woong Sun Lim0
Yi Yeon Kim0
Date of Patent
January 26, 2016
0Patent Application Number
141610500
Date Filed
January 22, 2014
0Patent Citations Received
Patent Primary Examiner
Patent abstract
This present disclosure relates to an atomic layer etching method for graphene, including adsorbing reactive radicals onto a surface of the graphene and irradiating an energy source to the graphene on which the reactive radicals are adsorbed.
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