Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 26, 2016
Patent Application Number
13959878
Date Filed
August 6, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
A highly reliable semiconductor device exhibiting stable electrical characteristics is provided. Further, a highly reliable semiconductor device is provided. Oxide semiconductor films are stacked so that the conduction band has a well-shaped structure. A second oxide semiconductor film having a crystalline structure is provided over the first oxide semiconductor film and a third oxide semiconductor film is provided over the second oxide semiconductor film. The bottom of a conduction band in the second oxide semiconductor film is deeper from a vacuum level than the bottom of a conduction band in the first oxide semiconductor film and the bottom of a conduction band in the third oxide semiconductor film.
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