US Patent 9257642 Protective sidewall techniques for RRAM

Some embodiments relate to a resistive random access memory (RRAM). The RRAM includes a RRAM bottom metal electrode, a variable resistance dielectric layer arranged over the RRAM bottom metal electrode, and a RRAM top metal electrode arranged over the variable resistance dielectric layer. A capping layer is arranged over the RRAM top metal electrode. A lower surface of the capping layer and an upper surface of the RRAM top metal electrode meet at an interface. Protective sidewalls are adjacent to outer sidewalls of the RRAM top metal electrode. The protective sidewalls have upper surfaces at least substantially aligned to the interface at which the upper surface of the RRAM top metal electrode meets the lower surface of the capping layer.