Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Fengji Yeh0
Jeffrey J. Hendron0
John G. Nowland0
Marty W. DeGroot0
Bainian Qian0
David B. James0
James Murnane0
Michelle Jensen0
...
Date of Patent
February 16, 2016
Patent Application Number
14228660
Date Filed
March 28, 2014
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A chemical mechanical polishing pad is provided having a polishing layer; and an endpoint detection window incorporated into the chemical mechanical polishing pad, wherein the endpoint detection window is a plug in place window; wherein the endpoint detection window comprises a reaction product of ingredients, comprising: a window prepolymer, and, a window curative system, comprising: at least 5 wt % of a window difunctional curative; at least 5 wt % of a window amine initiated polyol curative; and, 25 to 90 wt % of a window high molecular weight polyol curative.
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