Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hajime Furuya0
Masahiro Yamamoto0
Shintaro Sugihara0
Date of Patent
February 16, 2016
Patent Application Number
14281152
Date Filed
May 19, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
A joining device for joining substrates with an intermolecular force includes a first holding unit configured to hold a first substrate on a lower surface thereof, a second holding unit installed below the first holding unit and configured to hold a second substrate on an upper surface thereof, and a temperature adjustment mechanism configured to adjust a temperature of the first substrate before the first substrate is held in the first holding unit and a temperature of the second substrate before the second substrate is held in the second holding unit to a predetermined temperature.
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