Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 16, 2016
Patent Application Number
14560638
Date Filed
December 4, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor device may include a first insulating pillar having a substantially Y-shaped cross-sectional structure to define first through third regions, channel pillars formed in the first through third regions, respectively, and second insulating pillars disposed opposite one another across the first through third regions. The semiconductor device may also include third insulating pillars disposed between the second insulating pillars and disposed opposite one another across the first through third regions. The third insulating pillars may extend in a direction intersecting the second insulating pillars.
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