Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shao-Chi Yu0
Wei-Ding Wu0
Hong-Seng Shue0
Ming-Tai Chung0
Tai-I Yang0
Date of Patent
February 23, 2016
0Patent Application Number
134862650
Date Filed
June 1, 2012
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A device includes a semiconductor substrate, a contact plug over the semiconductor substrate, and an Inter-Layer Dielectric (ILD) layer over the semiconductor substrate, with the contact plug being disposed in the ILD. An air gap is sealed by a portion of the ILD and the semiconductor substrate. The air gap forms a full air gap ring encircling a portion of the semiconductor substrate.
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