US Patent 9273392 Apparatus for atomic layer deposition
Is a
Date Filed
January 30, 2012
0
Date of Patent
March 1, 2016
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Patent Application Number
13982270
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Patent Inventor Names
Adrianus Johannes Petrus Maria Vermeer
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Joseph Adrianus Maria De Swart
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Robert Coenraad Wit
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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