US Patent 9299559 Flowable oxide film with tunable wet etch rate
Is a
Date Filed
August 22, 2014
Date of Patent
March 29, 2016
Patent Application Number
14466222
Patent Inventor Names
Karena Shannon
0
Nerissa Draeger
0
Bart van Schravendijk
0
Kaihan Ashtiani
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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