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US Patent 9299595 Susceptor heater and method of heating a substrate

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Patent Citations Received
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US Patent 11979965 Susceptors for induction heating with thermal uniformity
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Patent abstract

A wafer processing apparatus may include a susceptor having a top side and a backside, a susceptor heater having a spacing member and a heating member, a shim removably mounted between the susceptor and the susceptor heater, a cavity formed by the susceptor backside, the susceptor heater, and the shim, a fluid inlet communicating with the cavity, and a plurality of fluid outlets communicating with the cavity.

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Patent Inventor Names
Fred Alokozai0
Jerry Winkler0
Michael Halpin0
Todd Dunn0
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US Patent 09299595 Susceptor heater and method of heating a substrate US Patent 9299595 Susceptor heater and method of heating a substrate

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Patent Number
092995950
Patent Number
92995950
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=092995950
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Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
092995950
Date of Patent
March 29, 2016
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Patent Application Number
145630440
Date Filed
December 8, 2014
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=092995950
Patent Primary Examiner
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Shawntina Fuqua
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=09299595
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 US Patent 09299595 Susceptor heater and method of heating a substrate

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09299595
Date of patent
March 29, 2016
Patent application number
14563044
Date Filed
December 8, 2014
Patent primary examiner
‌
Shawntina Fuqua

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