US Patent 9310265 Tactile sensor and multi-axial tactile sensor

A tactile sensor and a multi-axial tactile sensor are provided, each of which is thin and can measure shearing force. A multi-axial tactile sensor 1 includes a sensor element 2 provided in a plane substantially at the same level as the surface of a substrate 6, and an outer package member 42 covering around the sensor element 2 and transmitting external force to the sensor element 2. The sensor element 2 includes a flexible beam 7 (8) having at least one end supported by the substrate 6. The sensor element 2 detects deformation of the beam 7 (8), the deformation being caused in the direction in parallel with the surface of the substrate 6.